Ananthasuresh, Vinoy, Gopalakrishnan, Bhat, Aatre:

Micro and Smart Systems: Technology and Modeling, 1st Edition

Instructor Companion Site

Table Of Contents

Chapter 1: Introduction

Chapter 2: Micro Sensors, Actuators, Systems And Smart Materials: An Overview

Chapter 3: Micromachining Technologies

Chapter 4: Mechanics Of Slender Solids In Microsystems

Chapter 5: Finite Element Method

Chapter 6: Modeling Of Coupled Electromechanical Systems

Chapter 7: Electronics Circuits And Control For Micro And Smart Systems

Chapter 8: Integration Of Micro And Smart Systems

Chapter 9: Scaling Effects In Microsystems

Chapter 10: Simulation Of Microsystems Using Fea Software

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